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Tatiana V. Amotchkina, Sebastian Schlichting, Henrik Ehlers, Michael K. Trubetskov, Alexander V. Tikhonravov, and DetlevRistau, "Computational manufacturing as a key element in the design–production chain for modern multilayer coatings," Appl. Opt. 51, 7604-7615 (2012)
We propose a general approach that allows one to reveal factors causing production errors in the course of the deposition process controlled by broadband optical monitoring. We consider computational experiments simulating the real deposition process as a crucial point of this approach. We demonstrate application of the approach using multiple experimental deposition runs of the selected multilayer coatings.
Êëþ÷åâûå ñëîâà:
Computational manufacturing, monitoring, optical coatings
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